Oxford Instruments installs new plasma etch equipment at its applications lab in Taiwan’s ITRI

UK-based Oxford Instruments plc has boosted plasma process solutions for its customers in Asia by recently installing plasma etch equipment in their applications laboratory at Taiwan’s Industrial Technology Research Institute (ITRI), further enhancing the existing etch and deposition capabilities already provided there by Oxford Instruments.

The new PlasmaPro 100 Cobra and PlasmaPro 100 Polaris ICP etch tools were installed earier in October and are designed to serve the firm’s Asian customers, with a focus on the optoelectronic, wide-bandgap discrete device and sensors markets.

The new tool installations “complement our existing plasma etch and deposition systems already established in ITRI, enabling us to deliver efficient local service to our Asian markets,” says Ian Wright, VP sales & service for Asia, Oxford Instruments Plasma Technology (OIPT). “Our customers have the added benefit of full support from our dedicated applications team based in Taiwan, ensuring a fast response to customer enquiries.”

Oxford Instruments says that these recent improvements to the ITRI laboratory continue the long-standing research-based collaboration agreement between the two companies, based on Oxford Instruments providing a research center staffed by its process engineers at ITRI to the benefit of the extensive Far East customer base.

Oxford Instruments adds that its process lab at ITRI is performing leading process research and is ready to receive samples from customers.