• Home
  • About Us
  • Contact Us
Semiconductor for You
  • Home
  • Semiconductor News
  • Technology
    • Automotive
    • Consumer Electronics
    • IoT
    • Lighting
    • Power Management
    • Wireless
    • Personal Electronics
    • Hardware & Software
    • Research
    • Medical Electronics
    • Embedded Design
    • Aerospace & Defence
    • Artificial Intelligence
  • DIY Projects
  • Market
  • Industries
    • Renesas Electronics
  • Knowledge Base
  • Events
  • Tools
    • Resistor Color Code Calculator
No Result
View All Result
  • Home
  • Semiconductor News
  • Technology
    • Automotive
    • Consumer Electronics
    • IoT
    • Lighting
    • Power Management
    • Wireless
    • Personal Electronics
    • Hardware & Software
    • Research
    • Medical Electronics
    • Embedded Design
    • Aerospace & Defence
    • Artificial Intelligence
  • DIY Projects
  • Market
  • Industries
    • Renesas Electronics
  • Knowledge Base
  • Events
  • Tools
    • Resistor Color Code Calculator
No Result
View All Result
Semiconductor for You
No Result
View All Result
Home Semiconductor News

Semiconductor Analysis – Infrared Analysis of Organic Contaminants at Nanoscale Resolution

Semiconductor For You by Semiconductor For You
June 15, 2017
in Semiconductor News
0

Organic based nano-contaminants are a serious defect commonly found in micro-electronics manufacturing processes, including data storage, semiconductor and LED. These kinds of organic contaminants are a serious defectivity problem for Manufacturers because they cause yield problems, and process delays, and they can even lead to scrap product.

The contaminants come from different sources, including wafer transfer and handling, airborne molecular contamination, cleaning techniques, chemical processing and the amount of human interaction with the processes. Significant efforts are being made for the detection and prevention of defects; however, there is still an important class, including organic nanocontaminants, where an exact identification is difficult to achieve using existing instrumentation, due to inadequate resolution or even damage to the sample during measurement.

AFM-IR is a technique that can allow precise chemical identification of contaminants and provide multiple property analysis with nanoscale resolution.

The following are the key capabilities of the AFM-IR technique:

  • AFM-IR uniquely and unambiguously identifies organic nano-contaminants on wafers, media and slider substrates
  • Simultaneous nanoscale chemical and property mapping information
  • Nanoscale IR Spectroscopy directly correlates to FTIR libraries

Organic Nanocontamination of Bare Silicon Wafer

In order to show nanoscale chemical characterization capabilities on the nanoIR2-FS system, contaminated silicon wafers were prepared with known materials typically found in semiconductor fabrication environments and then examined. For each sample, tapping AFM-IR imaging was employed to trace the contaminants, followed by AFM-IR measurements.

The AFM height image (Figure 1a) shows the thickness variation (20 to 100 nm) of the contaminants that reside (human skin tissue) on the wafer. AFM-IR spectra were then gathered at sites with variable sample thickness (Fig. 1b).

The observed IR intensities varied with sample thickness, as expected.  However, the overall signal-to-noise ratio is enough to accurately detect the material, even at 20 nm thickness, reflecting the extraordinary sensitivity in the detection of thin samples.

Figure 1. (a) AFM height image of human skin residue on silicon wafer. (b) Corresponding AFM-IR spectra; Amide I and II bands are indicated.

The nanoIR2-FS’s new FASTspectra capabilities enable quicker acquisition of spectra over the full IR tuning range and allow for a reduction in spectral acquisition time by a factor of 10. As shown in Figure 2, this achievement still allows accurate collection of FTIR spectra.

The AFM-IR spectra obtained from the sample were compared with a common FTIR database (KnowItAll, Bio-Rad Inc.). The ~30 nm tall contamination residue was positively detected as polyethylene terephthalate (PET), a polymer typically used in polyester fabrics.

Figure 2. (a) AFM height image of a wafer with organic residue. (b) FASTspectra data on (red) and off (blue) the contaminant. (c) Positive FTIR database identification of the surface contaminant as PET.

Content Protection by DMCA.com
Semiconductor For You

Semiconductor For You

Browse by Category

  • Aerospace and Defence
  • Articles
  • Automotive
  • Consumer-Electronics
  • Hardware & Software
  • Interview
  • IoT
  • Knowledge Base
  • Lighting
  • Market
  • personal-electronics
  • Power Management
  • Research
  • Semiconductor Events
  • Semiconductor News
  • Technology
  • Wireless
Semiconductor for You

Semiconductor For You is a resource hub for electronics engineers and industrialist. With its blend of
technology features, news and new product information, Semiconductor For You keeps designers and
managers up to date with the fastest moving industry in the world.

Follow Us

Browse by Category

  • Aerospace and Defence
  • Articles
  • Automotive
  • Consumer-Electronics
  • Hardware & Software
  • Interview
  • IoT
  • Knowledge Base
  • Lighting
  • Market
  • personal-electronics
  • Power Management
  • Research
  • Semiconductor Events
  • Semiconductor News
  • Technology
  • Wireless

Recent News

SEGGER’s Ozone now available for macOS on the M1/M2 (ARM-core) by popular demand

SEGGER’s Ozone now available for macOS on the M1/M2 (ARM-core) by popular demand

March 28, 2023
Infineon AIROC™ CYW20829 Bluetooth LE SoC ready with latest Bluetooth 5.4 specification

Infineon AIROC™ CYW20829 Bluetooth LE SoC ready with latest Bluetooth 5.4 specification

March 24, 2023
  • About
  • Advertise
  • Privacy & Policy
  • Contact

© 2022 Semiconductor For You

No Result
View All Result
  • Home
  • Semiconductor News
  • Technology
    • IoT
    • Wireless
    • Power Management
    • Automotive
    • Hardware & Software
  • Market
  • Knowledge Base
  • Tools
    • Resistor Color Code Calculator

© 2022 Semiconductor For You

We use cookies on our website to give you the most relevant experience by remembering your preferences and repeat visits. By clicking “Accept”, you consent to the use of ALL the cookies.
Cookie settingsACCEPT
Manage consent

Privacy Overview

This website uses cookies to improve your experience while you navigate through the website. Out of these, the cookies that are categorized as necessary are stored on your browser as they are essential for the working of basic functionalities of the website. We also use third-party cookies that help us analyze and understand how you use this website. These cookies will be stored in your browser only with your consent. You also have the option to opt-out of these cookies. But opting out of some of these cookies may affect your browsing experience.
Necessary
Always Enabled
Necessary cookies are absolutely essential for the website to function properly. These cookies ensure basic functionalities and security features of the website, anonymously.
CookieDurationDescription
cookielawinfo-checbox-analytics11 monthsThis cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Analytics".
cookielawinfo-checbox-functional11 monthsThe cookie is set by GDPR cookie consent to record the user consent for the cookies in the category "Functional".
cookielawinfo-checbox-others11 monthsThis cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Other.
cookielawinfo-checkbox-necessary11 monthsThis cookie is set by GDPR Cookie Consent plugin. The cookies is used to store the user consent for the cookies in the category "Necessary".
cookielawinfo-checkbox-performance11 monthsThis cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Performance".
viewed_cookie_policy11 monthsThe cookie is set by the GDPR Cookie Consent plugin and is used to store whether or not user has consented to the use of cookies. It does not store any personal data.
Functional
Functional cookies help to perform certain functionalities like sharing the content of the website on social media platforms, collect feedbacks, and other third-party features.
Performance
Performance cookies are used to understand and analyze the key performance indexes of the website which helps in delivering a better user experience for the visitors.
Analytics
Analytical cookies are used to understand how visitors interact with the website. These cookies help provide information on metrics the number of visitors, bounce rate, traffic source, etc.
Advertisement
Advertisement cookies are used to provide visitors with relevant ads and marketing campaigns. These cookies track visitors across websites and collect information to provide customized ads.
Others
Other uncategorized cookies are those that are being analyzed and have not been classified into a category as yet.
SAVE & ACCEPT