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6-DoF XYZ-axis MEMS-based inertial sensor from Murata

Semiconductor For You by Semiconductor For You
February 23, 2021
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Hoofddorp, Netherlands: Murata announces the introduction of a 6-DoF (Degrees of Freedom) MEMS-based XYZ-axis inertial sensor for high-precision machine control and GNSS (Global Navigation Satellite System) positioning support. The SCHA63T features a digital SPI interface, enabling engineers to deliver industrial equipment with robust and reliable, centimetre-level positioning accuracy, even in environments where there is high mechanical shock and vibration. Target industrial applications are diverse and include IMUs (Inertial Measurement Units), machine control and guidance equipment, navigation and positioning systems, dynamic inclination, robotic control, and UAVs.

The high-performance parameters of the SCHA63T sensor, such as gyro bias instability, which is down to the 1°/h level, and gyro noise density of 0.0015°/s/√Hz, enable the device to achieve best in class performance. The low acceleration linearity error ensures high accuracy machine control and guidance. Cross-axis calibration enables better than 0.14° orthogonality error, saving system integrators valuable development time and money on performing this process themselves. Additional features include user-selectable filter settings of 13/20/46/300 Hz, and the extensive self-diagnostics enables it to be used in safety-critical applications.

The SCHA63T 6-DoF XYZ-axis inertial sensor is currently in mass production, with product samples available upon request. For more information, please visit: https://www.murata.com/en-us/products/sensor/gyro/scha600

Tags: MEMSMurataSemiconductors
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