IQE extends production of VCSEL epiwafers with Aixtron AIX 2800G4-TM MOCVD systems

Deposition equipment maker Aixtron SE of Herzogenrath, near Aachen, Germany has received an order for multiple metal-organic chemical vapor deposition (MOCVD) systems from epiwafer foundry and substrate maker IQE plc of Cardiff, Wales, UK. The AIX 2800G4-TM automated Planetary reactors are expected to be deployed for the growth of gallium arsenide (GaAs)-based epitaxial wafers on 6-inch substrates for the production of vertical-cavity surface-emitting lasers (VCSELs) for a range of photonic applications.

All systems are equipped in 8×6-inch configuration and will complement the existing AIX 2800G4-TM tools already in production at IQE to meet the rapidly growing market demand for VCSEL devices. Aixtron’s local support team will commission the new reactors until first-quarter 2018 in a new production facility recently leased as part of the Cardiff Capital Region (CCR) programs, which have a goal of supporting the development of the CS Connected compound semiconductor cluster in South Wales.

“We chose the AIX 2800G4-TM for our capacity expansion due to the excellent results we have already achieved with this platform in the past,” comments IQE’s chief operating officer Dr Howard Williams. “As a proven tool for high-volume production in the area of photonic applications it enables excellent epitaxial quality and yield on 6-inch wafers whilst also providing the flexibility we require as an epi foundry to serve our customers. Furthermore, the AIX 2800G4-TM platform offers outstanding uniformity and reproducibility. In addition, the backing of the Aixtron local support team will help us to quickly ramp up the systems and serve our customers timely in the current dynamic market situation,” he adds.

“We have been collaborating with IQE for more than 20 years and we are looking forward to contribute to their business success by supporting the planned production ramp-up in the best way possible,” says Aixtron’s vice president Europe Dr Frank Schulte. “The AIX 2800G4-TM reactor, which can even accommodate 5×8-inch wafers, has already built itself a strong reputation within the industry, mainly thanks to its unique material performance without compromising on the economies of scale of the Aixtron Planetary batch concept,” he concludes.