Semiconductor equipment company Aixtron has announced that Chinese optoelectronics manufacturer San’an has successfully completed the qualification of Aixtron’s novel Close Coupled Showerhead (CCS) process chamber designed for the production of deep UV (DUV) LEDs.
The new process chamber is based on Aixtron’s CCS technology. It is said to be the first commercially available MOCVD reactor that offers the high process temperatures as needed for the production of DUV LEDs.
The enhanced chamber performance is designed for cost-efficient high volume manufacturing of DUV LEDs as used for water and air purification. The configuration of 19 x 2-inch wafers represents the largest capacity currently available in the market for this high end MOCVD application.
Ryan Chuo, VP of Technology Centre, San’an Optoelectronics, comments: “The new Aixtron CCS reactor design is a key enabling factor for San’an producing next generation DUV LED products with higher quantum efficiencies and significantly higher output powers. Already being one of the largest suppliers for LEDs, Aixtron’s newly designed process chamber perfectly supports our strategic targets in the area of DUV LEDs to further strengthen our industry leadership. Therefore, we are very pleased to be the first company to qualify and utilise Aixtron’s new reactor kit.”